JPH025006U - - Google Patents
Info
- Publication number
- JPH025006U JPH025006U JP8329788U JP8329788U JPH025006U JP H025006 U JPH025006 U JP H025006U JP 8329788 U JP8329788 U JP 8329788U JP 8329788 U JP8329788 U JP 8329788U JP H025006 U JPH025006 U JP H025006U
- Authority
- JP
- Japan
- Prior art keywords
- metal thin
- conversion element
- thin film
- reflected light
- detection means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 2
- 239000010408 film Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8329788U JPH025006U (en]) | 1988-06-23 | 1988-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8329788U JPH025006U (en]) | 1988-06-23 | 1988-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH025006U true JPH025006U (en]) | 1990-01-12 |
Family
ID=31308021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8329788U Pending JPH025006U (en]) | 1988-06-23 | 1988-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH025006U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646404A (en) * | 1979-09-25 | 1981-04-27 | Nec Corp | Measuring device of optical film thickness |
| JPS60242308A (ja) * | 1984-02-02 | 1985-12-02 | ロ−レンス・エス・キヤニノ | 薄いサンプルの厚さの測定方法及びその装置並びに薄いサンプルの特性の測定方法及びその装置 |
-
1988
- 1988-06-23 JP JP8329788U patent/JPH025006U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646404A (en) * | 1979-09-25 | 1981-04-27 | Nec Corp | Measuring device of optical film thickness |
| JPS60242308A (ja) * | 1984-02-02 | 1985-12-02 | ロ−レンス・エス・キヤニノ | 薄いサンプルの厚さの測定方法及びその装置並びに薄いサンプルの特性の測定方法及びその装置 |